In the world of nanotechnology, where structures are measured in billionths of a meter, precise imaging and measurement techniques are essential. Critical Dimension Scanning Electron Microscopy ...

An example of a correlative study between XRM and FIB-SEM has been presented in an earlier study. 1 This article will expand the correlation one step beneath the length scale to link FIB-SEM and TEM, ...

A team of researchers at the University of Victoria (UVic) have achieved a major breakthrough in electron microscopy that will allow scientists to visualize atomic-scale structures with unprecedented ...

CD-SEM, the workhorse metrology tool used by fabs for process control, is facing big challenges at 5nm and below. Traditionally, CD-SEM imaging has relied on a limited number of image frames for ...

Validation of the LIG Nanowise SMAL lens revealed its ability to resolve features down to 137 nm, demonstrating true ...