Micro-Electro-Mechanical-Systems (MEMS) are three-dimensional structures made using silicon micromachining technologies. They made their first appearance in semiconductor fabs in the sixties and, ...
A surface micromachining technology for building microelectromechanical sensor and actuator systems in silicon stands out for its ability to fashion suspended structures that are anchored to the ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback